New Arrival: LAM 810-069751-114 Industrial Control Module
Product Highlights
- Model: 810-069751-114
- Brand: LAM Research
- Voltage: 220V AC
- Frequency: 30 kHz ±2%
- Certifications: CE, RoHS
Core Features
- Precision plasma etching for 300mm wafers
- Advanced RF power delivery system (0-3000W)
- Integrated temperature control (-20°C to +150°C)
- Ethernet/IP industrial communication protocol
- Real-time process monitoring with ±0.5% accuracy
Application Scenarios
Ideal for:
- Advanced 7nm semiconductor fabrication
- 3D NAND memory production lines
- Compound semiconductor processing
- MEMS device manufacturing
Technical Specifications
| Chamber Pressure Range | 1-1000 mTorr |
| Gas Flow Control | 0-500 sccm ±1% |
| Matching Network | Automatic 50Ω impedance |
Why Choose Apextron?
- 20+ years industrial automation expertise
- 60,000+ components in 5,000m² warehouse
- Global shipping via UPS/DHL/FedEx
- 1-year warranty & technical support
- 24/7 emergency replacement service
Contact our experts now:
WhatsApp: +86 190 6659 1275
Email: abbdcs36@gmail.com
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